Development of a micro-fabrication process for micro devices

Micro-layered-photolithography for Micro- Fabrication and Micro-molding

A novel process based on the principle of layered photolithography has been proposed and tested for making three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dim...

Nozzle Fabrication for Micro Propulsion of a Micro Satellite

⎯ To enable formation flying of micro satellites, small sized propulsion systems are required. Our research focuses on the miniaturization of a feeding and thruster system by means of micro system technology (MST). Three fabrication methods have been investigated to make a conical converging-diverging nozzle. These methods are reactive ion etching, femtosecond laser machining (FLM) and a combin...

Soft Lithographic Fabrication of Micro Optic and Guided Wave Devices

Three-dimensional Micro Fabrication of Active Micro Devices Using Soft Functional Materials by Ho

Active materials that can adapt to dynamic environment have attracted growing attention in various fields of science and engineering because they hold great potential in development of autonomous and multifunctional devices and systems. Hydrogels, which swell and contract in response to a wide range of external stimuli, have been studied extensively as one of the most promising functional mater...

Fabrication of LTCC Micro-fluidic Devices Using Sacrificial Carbon Layers

Ease of fabrication and design flexibility are two attractive features of low temperature co-fired ceramics (LTCC) technology for fabrication of complex micro-fluidic devices. Such structures are designed and processed using different shaping methods, the extent and complexity of which depends on the final device specifications (dimensions, mechanical and functional properties). In this work, w...